Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12519847
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Filing Dt:
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12/01/2009
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Publication #:
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Pub Dt:
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04/08/2010
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Inventors:
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Noriaki Kanaya, Koki Asakawa, Kiyohito Iijima, Masayuki Hirose
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Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD OF MANAGING APPARATUS OPERATION PARAMETERS, AND PROGRAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| CANTOR COLBURN, LLP |
| 20 CHURCH STREET, 22ND FLOOR |
| HARTFORD, CT 06103 |
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