Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12254291
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Filing Dt:
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10/20/2008
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Publication #:
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Pub Dt:
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04/22/2010
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Inventors:
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Fransisca Maria Astrid Sudargho, Ara Philipossian, Koichiro Ichikawa et al
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Title:
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METHOD AND APPARATUS FOR DETERMINING SHEAR FORCE BETWEEN THE WAFER HEAD AND POLISHING PAD IN CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SUGHRUE MION, PLLC |
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