Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12628603
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Filing Dt:
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12/01/2009
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Publication #:
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Pub Dt:
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04/29/2010
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Inventors:
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Masato Tsuchiya, Syunichi Ogasawara
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Title:
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PROCESS CONTROL METHOD IN SPIN ETCHING AND SPIN ETCHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2174-1, HODOTA-MACHI, |
| TAKASAKI-SHI, GUNMA, JAPAN 3703533 |
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| ARENT FOX LLP |
| 1050 CONNECTICUT AVE, NW |
| SUITE 400 |
| WASHINGTON, DC 20036 |
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