Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12597637
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Filing Dt:
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12/08/2009
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Publication #:
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Pub Dt:
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06/03/2010
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Inventors:
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Yasuhiro Morikawa, Koukou Suu, Toshio Hayashi
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Title:
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DRY ETCHING APPARATUS AND DRY ETCHING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2500 HAGISONO, CHIGASAKI |
| KANAGAWA, JAPAN 253-8543 |
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| TOMOKO NAKAJIMA |
| 515 EAST BRADDOCK RD |
| ALEXANDRIA, VA 22314 |
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