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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
12342262
Filing Dt:
12/23/2008
Publication #:
Pub Dt:
06/24/2010
Inventors:
Joseph P Dzengeleski, Timothy J. Miler, Jay T. Scheuer, Christopher J. Leavitt
Title:
METHOD AND APPARATUS FOR PLASMA DOSE MEASUREMENT
Assignment: 1
Reel/Frame:
022213/0953Recorded: 02/05/2009Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/05/2009
Exec Dt:
02/05/2009
Exec Dt:
02/05/2009
Exec Dt:
02/05/2009
Assignee:
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
VARIAN SEMICONDUCTOR EQUIPMENT ASSC., IN
35 DORY RD.
GLOUCESTER, MA 01930-2297

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