Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/11/2011
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Application #:
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11289313
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Filing Dt:
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11/30/2005
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Publication #:
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Pub Dt:
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06/24/2010
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Inventor:
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Robert Steger
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Title:
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METHOD OF DETERMINING A TARGET MESA CONFIGURATION OF AN ELECTROSTATIC CHUCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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PETER K. SKIFF |
BUCHANAN INGERSOLL PC |
(INCLUDING BURNS, DOANE, SWECKER |
& MATHIS) POST OFFICE BOX 1404 |
ALEXANDRIA, VA 22313-1404 |
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