Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12667806
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Filing Dt:
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01/05/2010
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Publication #:
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Pub Dt:
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07/15/2010
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Inventors:
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Toshirou Kisakibaru, Makoto Okada, Yasushi Honda, Naoji Iida
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Title:
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Apparatus for Charging Dry Air or Nitrogen Gas into a Container for Storing Semiconductor Wafers and an Apparatus for Thereby Removing Static Electricity from the Wafers
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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10-1, TORANOMON 2-CHOME, MINATO-KU |
TOKYO, JAPAN 105-0001 |
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10-1, TORANOMON 2-CHOME, MINATO-KU |
TOKYO, JAPAN 105-0001 |
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KATHRYN E. NOLL |
125 SUMMER STREET |
SUNSTEIN KANN MURPHY & TIMBERS LLP |
BOSTON, MA 02110-1618 |
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