Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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12295108
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Filing Dt:
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09/29/2008
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Publication #:
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Pub Dt:
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07/15/2010
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Inventors:
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Fan Wang, Mingying Ma, Xiangzhao Wang
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Title:
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METHOD FOR IN-SITU ABERRATION MEASUREMENT OF OPTICAL IMAGING SYSTEM IN LITHOGRAPHIC TOOLS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK |
| SHANGHAI, CHINA 201203 |
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| RABIN & BERDO, P.C. |
| 1101 14TH ST. N.W. |
| SUITE 500 |
| WASHINGTON, DC 20005 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK |
| SHANGHAI, CHINA 201203 |
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| MUNCY, GEISSLER, OLDS & LOWE, PC |
| 4000 LEGATO RD., SUITE 310 |
| FAIRFAX, VA 22033 |
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Assignment:
3
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CORRECTIVE ASSIGNMENT TO CORRECT THE APPLICATION SERIAL NUMBER PREVIOUSLY RECORDED AT REEL: 043517 FRAME: 0989. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
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| 1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK |
| SHANGHAI, CHINA 201203 |
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| MUNCY, GEISSLER, OLDS & LOWE, PC |
| 4000 LEGATO RD., SUITE 310 |
| FAIRFAX, VA 22033 |
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