Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12669575
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Filing Dt:
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02/01/2010
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Publication #:
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Pub Dt:
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08/12/2010
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Inventors:
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Kanji Yasui, Hiroshi Nishiyama, Kazuyuki Tamura, Yasunobu Inoue
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Title:
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DEPOSITION METHOD AND DEPOSITION APPARATUS FOR NITRIDE FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1603-1, KAMITOMIOKA-CHO, NAGAOKA-SHI, |
| NIIGATA, JAPAN 940-2188 |
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| 3-1, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 107-6325 |
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| IPUSA, P.L.L.C |
| 1054 31ST STREET, N.W. |
| SUITE 400 |
| WASHINGTON, DC 20007 |
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