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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8404572
Issue Dt:
03/26/2013
Application #:
12370746
Filing Dt:
02/13/2009
Publication #:
20100210041
Pub Dt:
08/19/2010
Inventors:
Chun-Lin Chang, Hsin-Hsien Wu, Jun-Lin Yeh, Zin-Chang Wei, Chi-Ming Yang, Jih-Jse Lin et al
Title:
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
Assignment: 1
Reel/Frame:
023170/0833Recorded: 08/31/2009Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHANG, CHUN-LIN
Exec Dt:
08/03/2009
WU, HSIN-HSIEN
Exec Dt:
08/03/2009
WEI, ZIN-CHANG
Exec Dt:
08/12/2009
YANG, CHI-MING
Exec Dt:
08/03/2009
CHERN, CHYI-SHYUAN
Exec Dt:
08/03/2009
YEH, JUN-LIN
Exec Dt:
08/20/2009
LIN, JIH-JSE
Exec Dt:
02/24/2009
WANG, JO-FEI
Exec Dt:
03/01/2009
FAN, MING-YU
Exec Dt:
03/06/2009
MOU, JONG-I
Exec Dt:
03/06/2009
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN ROAD 6
SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU, TAIWAN 300-77
Correspondent:
DUANE MORRIS LLP, STEVEN E. KOFFS
30 SOUTH 17TH STREET
PHILADELPHIA, PA 19103-4196

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