Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/25/2013
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Application #:
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12726908
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Filing Dt:
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03/18/2010
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Publication #:
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Pub Dt:
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09/23/2010
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Inventors:
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Alexander Huebel, Matthias Manger, Gerd Klose, Michael Arnz, Uwe Schellhorn
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Title:
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METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND METROLOGY SYSTEM COMPRISING A SPECIMEN STAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-PROMENADE 10 |
| JENA, GERMANY D-07745 |
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| DIANE M. SATURNO |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| MARC WEFERS |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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