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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/18/2014
Application #:
12661699
Filing Dt:
03/19/2010
Publication #:
Pub Dt:
09/30/2010
Inventors:
Beom Soo Park, Hong Soon Kim, John M. White, James Hoffman, Suhail Anwar, Soo Young Choi
Title:
DETECTING PLASMA CHAMBER MALFUNCTION
Assignment: 1
Reel/Frame:
024565/0200Recorded: 06/21/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/15/2010
Exec Dt:
05/04/2010
Exec Dt:
05/11/2010
Exec Dt:
05/27/2010
Exec Dt:
05/14/2010
Exec Dt:
05/14/2010
Assignee:
P. O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS
P.O. BOX 450A
SANTA CLARA, CA 95052

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