Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12756086
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Filing Dt:
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04/07/2010
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Publication #:
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Pub Dt:
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10/14/2010
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Inventors:
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Bing Ji, Kenji Takeshita, Andrew D. Bailey III, Eric A. Hudson, Maryam Moravej et al
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Title:
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METHOD FOR LOW-K DIELECTRIC ETCH WITH REDUCED DAMAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 1687 |
| CUPERTINO, CA 95015-1687 |
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