Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12502988
|
Filing Dt:
|
07/14/2009
|
|
Publication #:
|
|
Pub Dt:
|
10/28/2010
| | | | |
|
Inventors:
|
Jinyuan CHEN, Liang Ouyang, Zhiyou Du, Gerald Yin, Junichi Arami, Xueyu Qian
|
|
Title:
|
ELECTROSTATIC CHUCK AND BASE FOR PLASMA REACTOR HAVING IMPROVED WAFER ETCH RATE
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| P.O. BOX 309GT, UGLAND HOUSES, SOUTH CHURCH STREET |
| GEORGETOWN, GRAND CAYMAN, CAYMAN ISLANDS |
|
|
|
|
| NIXON PEABODY, LLP |
| 401 9TH STREET, N.W. |
| SUITE 900 |
| WASHINGTON, DC 20004-2128 |
|
|
Search Results as of:
05/06/2024 03:25 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
