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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
12731030
Filing Dt:
03/24/2010
Publication #:
20100273291
Pub Dt:
10/28/2010
Inventors:
Olga Kryliouk, Jie Su, Kevin Griffin, Sung Won Jun, Sandeep Nijwahan, Xizi Dong, Tze Poon et al
Title:
DECONTAMINATION OF MOCVD CHAMBER USING NH3 PURGE AFTER IN-SITU CLEANING
Assignment: 1
Reel/Frame:
024375/0069Recorded: 05/12/2010Pages: 14
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KRYLIOUK, OLGA
Exec Dt:
04/08/2010
SU, JIE
Exec Dt:
04/07/2010
GRIFFIN, KEVIN
Exec Dt:
04/07/2010
JUN, SUNG WON
Exec Dt:
04/12/2010
NIJWAHAN, SANDEEP
Exec Dt:
04/14/2010
DONG, XIZI
Exec Dt:
04/07/2010
POON, TZE
Exec Dt:
04/07/2010
WASHINGTON, LORI D.
Exec Dt:
04/16/2010
GRAYSON, JACOB
Exec Dt:
04/12/2010
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CALIFORNIA 95052
Correspondent:
ROBERT W. MULCAHY
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CA 95052

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