Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/15/2014
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Application #:
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12662582
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Filing Dt:
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04/23/2010
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Publication #:
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Pub Dt:
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11/11/2010
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Inventors:
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Tsutomu Ogihara, Toshiharu Yano, Takafumi Ueda
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Title:
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Composition for forming a silicon-containing antireflection film, substrate having the silicon-containing antireflection film from the composition and patterning process using the same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6-1, OHTEMACHI 2-CHOME |
CHIYODA-KU |
TOKYO, JAPAN |
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WILLIAM P. BERRIDGE |
OLIFF & BERRIDGE, PLC |
P.O. BOX 320850 |
ALEXANDRIA, VA 22320-4850 |
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