Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12763653
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Filing Dt:
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04/20/2010
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Publication #:
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Pub Dt:
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11/25/2010
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Inventors:
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Sundar Ramamurthy, Majeed Foad, Matthew Scotney-Castle, Marla Britt, Yen B. Ta
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Title:
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HIGH THROUGHPUT SELECTIVE OXIDATION OF SILICON AND POLYSILICON USING PLASMA AT ROOM TEMPERATURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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LEGAL AFFAIRS DEPT. |
P.O. BOX 450-A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIED MATERIALS, INC. |
LEGAL AFFAIRS DEPT |
P.O. BOX 450-A |
SANTA CLARA, CA 95052 |
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