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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/17/2013
Application #:
12865763
Filing Dt:
08/02/2010
Publication #:
Pub Dt:
12/23/2010
Inventor:
Hiroyuki Tachibana
Title:
ATOMIC LAYER DEPOSITION APPARATUS AND ATOMIC LAYER DEPOSITION METHOD
Assignment: 1
Reel/Frame:
024773/0188Recorded: 08/02/2010Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
07/26/2010
Assignee:
6-4, TSUKIJI 5-CHOME
CHUO-KU, TOKYO, JAPAN 104-8439
Correspondent:
GLOBAL IP COUNSELORS, LLP
1233 20TH STREET, NW, SUITE 700
WASHINGTON, DC 20036-2680

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