Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12805301
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Filing Dt:
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07/22/2010
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Publication #:
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Pub Dt:
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01/27/2011
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Inventors:
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Hideo Nakamura, Yoshiro Kabe, Junichi Kitagawa
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Title:
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Method for forming silicon oxide film, storage medium, and plasma processing apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| MICHAEL A. MAKUCH |
| 1130 CONNECTICUT AVE. NW, STE 1130 |
| SMITH, GAMBRELL & RUSSELL, LLP |
| WASHINGTON, DC 20036 |
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