Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/23/2015
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Application #:
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12838831
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Filing Dt:
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07/19/2010
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Publication #:
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Pub Dt:
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01/27/2011
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Inventors:
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Hitoshi MURATA, Tetsuya KOSUGI, Shinobu Sugiura, Masaaki UENO
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Title:
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HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1 SOTOKANDA 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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| BRUNDIDGE & STANGER, P.C. |
| 23181 MILL ROAD |
| SUITE 1020 |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 3-4 KANDA-KAJICHO, CHIYODA-KU |
| TOKYO, JAPAN |
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| BRUNDIDGE & STANGER, P.C. |
| 1925 BALLENGER AVENUE, SUITE 560 |
| ALEXANDRIA, VA 22314 |
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