Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/16/2012
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Application #:
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12840602
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Filing Dt:
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07/21/2010
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Publication #:
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Pub Dt:
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02/03/2011
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Inventors:
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Takuya Seino, Takashi Nakagawa, Naomu Kitano, Toru Tatsumi
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Title:
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METHOD OF MANUFACUTRING HAFNIUM-CONTAINING AND SILICON-CONTAINING METAL OXYNITRIDE DIELECTRIC FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI, KANAGAWA, JAPAN 215-8550 |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 12 |
| NEW YORK, NY 10104 |
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