Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/17/2011
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Application #:
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12868089
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Filing Dt:
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08/25/2010
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Publication #:
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Pub Dt:
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03/03/2011
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Inventors:
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Yoshihiko YANAGISAWA, Mitsuro TANABE, Harunobu SAKUMA, Tadashi TAKASAKI
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICES MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| JOHN R. MATTINGLY, MATTINGLY & MALUR |
| 1800 DIAGONAL RD. |
| SUITE 370 |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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