Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/19/2013
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Application #:
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12854545
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Filing Dt:
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08/11/2010
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Publication #:
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Pub Dt:
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03/10/2011
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Inventors:
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Byoungil LEE, Hyeokjin Jang, Sungyong Ko, Minshik Kim
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Title:
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WORKPIECE DE-CHUCKING DEVICE OF PLASMA REACTOR FOR DRY-CLEANING INSIDE OF REACTION CHAMBER AND ELECTROSTATIC CHUCK DURING WORKPIECE DE-CHUCKING, AND WORKPIECE DE-CHUCKING METHOD USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4TH FL., 958-1, YOUNGTONG-DONG, YOUNGTONG-KU, |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF 443-810 |
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| IPLA P.A. |
| 3550 WILSHIRE BLVD. |
| 17TH FLOOR |
| LOS ANGELES, CA 90010 |
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