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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/26/2013
Application #:
12954087
Filing Dt:
11/24/2010
Publication #:
Pub Dt:
03/24/2011
Inventors:
Dan Katz, David Palagashvili, Michael D. Willwerth, Alexander M. Paterson et al
Title:
METHOD OF PROCESSING A WORKPIECE IN A PLASMA REACTOR WITH INDEPENDENT WAFER EDGE PROCESS GAS INJECTION
Assignment: 1
Reel/Frame:
029393/0864Recorded: 12/03/2012Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/24/2007
Exec Dt:
10/23/2007
Exec Dt:
10/25/2007
Exec Dt:
10/23/2007
Exec Dt:
10/24/2007
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
LAW OFFICE OF ROBERT M. WALLACE
2112 EASTMAN AVENUE, SUITE 102
VENTURA, CA 93003

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