Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/16/2013
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Application #:
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12992209
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Filing Dt:
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11/11/2010
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Publication #:
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Pub Dt:
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03/31/2011
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Inventors:
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Hirokazu Ueda, Yoshinobu Tanaka, Yusuke Ohsawa, Toshihisa Nozawa, Takaaki Matsuoka
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Title:
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FILM FORMING METHOD OF SILICON OXIDE FILM, SILICON OXIDE FILM, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| CANTOR COLBURN LLP |
| 20 CHURCH STREET, 22ND FLOOR |
| HARTFORD, CT 06103 |
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