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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/27/2017
Application #:
12890281
Filing Dt:
09/24/2010
Publication #:
Pub Dt:
03/31/2011
Inventors:
Shinichi Kurita, Takayuki Matsumoto, Suhail Anwar, Makoto Inagawa
Title:
SUBSTRATE TRANSFER ROBOT WITH CHAMBER AND SUBSTRATE MONITORING CAPABILITY
Assignment: 1
Reel/Frame:
025325/0691Recorded: 11/05/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/11/2010
Exec Dt:
10/07/2010
Exec Dt:
10/07/2010
Exec Dt:
10/06/2010
Assignee:
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CALIFORNIA 95052
Correspondent:
ROBERT W. MULCAHY
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CA 95052

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