Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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12/31/2013
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Application #:
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12906053
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Filing Dt:
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10/15/2010
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Publication #:
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Pub Dt:
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04/21/2011
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Inventors:
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Kam S. LAW, Masato Toshima, Wendell Thomas Blonigan, Robin K. F. Law, Linh Can
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Title:
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SHOWERHEAD ASSEMBLY FOR PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17 GREAT OAKS BOULEVARD |
| SAN JOSE, CALIFORNIA 95119 |
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| NIXON PEABODY, LLP. |
| 401 9TH STREET, N.W. |
| SUITE 900 |
| WASHINGTON, DC 20004-2128 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 215 |
| YAVNE, ISRAEL 8110101 |
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| KLA CORPORATION |
| ONE TECHNOLOGY DRIVE |
| LEGAL DEPARTMENT |
| MILPITAS, CA 95035 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5970 OPTICAL COURT |
| SAN JOSE, CALIFORNIA 95138 |
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| KLA CORPORATION |
| ONE TECHNOLOGY DRIVE |
| LEGAL DEPARTMENT |
| MILPITAS, CA 95035 |
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Assignment:
4
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE, LEGAL DEPARTMENT |
| MILPITAS, CALIFORNIA 95035 |
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| KLA CORPORATION |
| ONE TECHNOLOGY DRIVE |
| LEGAL DEPARTMENT |
| MILPITAS, CA 95035 |
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