Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12973112
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Filing Dt:
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12/20/2010
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Publication #:
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Pub Dt:
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04/21/2011
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Inventors:
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AARON MUIR HUNTER, Bruce E. Adams, Mehran Behdjat, Rajesh S. Ramanujam et al
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Title:
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TEMPERATURE MEASUREMENT AND CONTROL OF WAFER SUPPORT IN THERMAL PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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B. TODD PATTERSON |
PATTERSON & SHERIDAN, LLP |
3040 POST OAK BLVD, SUITE 1500 |
HOUSTON, TX 77056 |
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04/27/2024 07:51 PM
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