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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/08/2014
Application #:
12904513
Filing Dt:
10/14/2010
Publication #:
Pub Dt:
04/21/2011
Inventors:
Siegfried Rennon, Hans-Juergen Mann, Thomas Schicketanz
Title:
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC EUV PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
025221/0424Recorded: 10/29/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/10/2010
Exec Dt:
10/22/2010
Exec Dt:
10/25/2010
Assignee:
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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