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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/10/2016
Application #:
12950105
Filing Dt:
11/19/2010
Publication #:
Pub Dt:
04/21/2011
Inventors:
Ganesh Balasubramanian, Amit Bansal, Eller Y. Juco, Visweswaren Sivaramakrishnan et al
Title:
APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER
Assignment: 1
Reel/Frame:
026104/0011Recorded: 04/08/2011Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/09/2007
Exec Dt:
10/24/2007
Exec Dt:
10/08/2007
Exec Dt:
10/09/2007
Exec Dt:
10/09/2007
Exec Dt:
10/10/2007
Exec Dt:
10/25/2007
Exec Dt:
10/10/2007
Exec Dt:
10/10/2007
Exec Dt:
10/09/2007
Exec Dt:
10/20/2007
Exec Dt:
10/29/2007
Exec Dt:
10/15/2007
Exec Dt:
10/09/2007
Exec Dt:
10/09/2007
Exec Dt:
10/15/2007
Exec Dt:
10/09/2007
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
B. TODD PATTERSON
PATTERSON & SHERIDAN, LLP
3040 POST OAK BLVD, SUITE 1500
HOUSTON, TX 77056

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