Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12996878
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Filing Dt:
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12/08/2010
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Publication #:
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Pub Dt:
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04/21/2011
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Inventors:
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Hideyuki Nitta, Takashi Hosono, Takefumi Minato, Yoshihisa Kase, Makoto Muto
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Title:
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PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-1, KASAMA 2-CHOME, SAKAE-KU |
| YOKOHAMA-SHI, KANAGAWA-KEN, JAPAN |
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| PEARNE & GORDON LLP |
| 1801 EAST 9TH STREET |
| SUITE 1200 |
| CLEVELAND, OH 44114-3108 |
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