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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/02/2016
Application #:
12913183
Filing Dt:
10/27/2010
Publication #:
Pub Dt:
04/28/2011
Inventors:
Yohei Yamazawa, Masashi Saito, Kazuki Denpoh, Jun Yamawaku, Chishio Koshimizu
Title:
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Assignment: 1
Reel/Frame:
025558/0406Recorded: 12/30/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/08/2010
Exec Dt:
12/08/2010
Exec Dt:
12/08/2010
Exec Dt:
12/08/2010
Exec Dt:
12/08/2010
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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