Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12883602
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Filing Dt:
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09/16/2010
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Publication #:
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Pub Dt:
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05/12/2011
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Inventors:
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Susumu TAUCHI, Hideaki Kondo, Keita Nogi, Takafumi Chida, Teruo Nakata, Atsushi Shimoda
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Title:
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VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUCTOR PROCESSING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8717 |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209-3873 |
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