Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/22/2011
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Application #:
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13010424
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Filing Dt:
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01/20/2011
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Publication #:
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Pub Dt:
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05/26/2011
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Inventors:
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Maurits VAN DER SCHAAR, Arie Jeffrey DEN BOEF, Stefan Carolus Jacobus Antonius KEIJ et al
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Title:
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SUBSTRATE USED IN A METHOD AND APPARATUS FOR ANGULAR-RESOLVED SPECTROSCOPIC LITHOGRAPHY CHARACTERIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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