Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/27/2013
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Application #:
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12744012
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Filing Dt:
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02/09/2011
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Publication #:
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Pub Dt:
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06/23/2011
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Inventors:
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Wonchul Lee, Qian Fu, Shenjian Liu, Bryan Pu
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Title:
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METHOD OF CONTROLLING ETCH MICROLOADING FOR A TUNGSTEN-CONTAINING LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER LAW GROUP LLP |
| P.O. BOX 1687 |
| CUPERTINO, CA 95015-1687 |
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