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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13015258
Filing Dt:
01/27/2011
Publication #:
Pub Dt:
06/30/2011
Inventors:
Kaitlin Olsen, Weidong Huang, Christine Richardson
Title:
Controlling the Temperature Profile in a Sheet Wafer
Assignment: 1
Reel/Frame:
025977/0596Recorded: 03/17/2011Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/07/2011
Exec Dt:
02/15/2011
Exec Dt:
03/08/2011
Assignee:
138 BARTLETT STREET
MARLBOROUGH, MASSACHUSETTS 01752
Correspondent:
KATHRYN E. NOLL
SUNSTEIN KANN MURPHY & TIMBERS LLP
125 SUMMER STREET
BOSTON, MA 02110-1618

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