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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/26/2016
Application #:
12979875
Filing Dt:
12/28/2010
Publication #:
Pub Dt:
06/30/2011
Inventors:
Shinji HIMORI, Daisuke Hayashi, Akitaka Shimizu
Title:
PLASMA PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
025939/0557Recorded: 03/11/2011Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/12/2011
Exec Dt:
01/12/2011
Exec Dt:
01/12/2011
Assignee:
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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