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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8632687
Issue Dt:
01/21/2014
Application #:
13058635
Filing Dt:
04/13/2011
Publication #:
20110183523
Pub Dt:
07/28/2011
Inventors:
Nicole Auth, Petra Spies, Rainer Becker, Thorsten Hofmann, Klaus Edinger
Title:
METHOD FOR ELECTRON BEAM INDUCED ETCHING OF LAYERS CONTAMINATED WITH GALLIUM
Assignment: 1
Reel/Frame:
026114/0353Recorded: 04/13/2011Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
AUTH, NICOLE
Exec Dt:
03/16/2011
SPIES, PETRA
Exec Dt:
03/10/2011
BECKER, RAINER
Exec Dt:
03/11/2011
HOFMANN, THORSTEN
Exec Dt:
03/09/2011
EDINGER, KLAUS
Exec Dt:
03/04/2011
Assignee:
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10
JENA, GERMANY 07745
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
040069/0705Recorded: 09/19/2016Pages: 7
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
CARL ZEISS SMS GMBH
Exec Dt:
05/12/2015
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
MARC WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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