Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12853394
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Filing Dt:
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08/10/2010
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Publication #:
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Pub Dt:
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08/04/2011
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Inventor:
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Michael X. Yang
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Title:
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DUAL HEATING FOR PRECISE WAFER TEMPERATURE CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
| 35 DORY ROAD |
| GLOUCESTER, MA 01930 |
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