Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12999985
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Filing Dt:
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01/19/2011
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Publication #:
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Pub Dt:
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08/04/2011
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Inventors:
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Tadahiro Ohmi, Tetsuya Goto, Nobuaki Seki, Satoru Kawakami, Takaaki Matsuoka
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Title:
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MAGNETRON SPUTTERING METHOD, AND MAGNETRON SPUTTERING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| 1-1, KATAHIRA 2-CHOME, AOBA-KU, MIYAGI |
| SENDAI-SHI, JAPAN 980-8577 |
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| CANTOR COLBURN LLP |
| 20 CHURCH STREET, 22ND FLOOR |
| HARTFORD, CT 06103 |
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