Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13066932
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Filing Dt:
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04/28/2011
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Publication #:
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Pub Dt:
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08/25/2011
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Inventors:
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Akio Yamada, Takayuki Yabe
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Title:
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Multi-column electron beam lithography apparatus and electron beam trajectory adjustment method for the same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 32-1, ASAHI-CHO 1-CHOME, NERIMA-KU, |
| TOKYO, 179-0071, JAPAN |
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| YASUO MURAMATSU |
| MURAMATSU & ASSOCIATES |
| SUITE 310 |
| 114 PACIFICA |
| IRVINE, CA 92618 |
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