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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8253947
Issue Dt:
08/28/2012
Application #:
12518968
Filing Dt:
12/16/2009
Publication #:
20110205549
Pub Dt:
08/25/2011
Inventors:
Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Monika Frey, Wolfgang Scherm et al
Title:
DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
Assignment: 1
Reel/Frame:
023614/0218Recorded: 12/07/2009Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
HOF, ALBRECHT
Exec Dt:
11/19/2009
MAUL, GUNTER
Exec Dt:
11/20/2009
NEUGEBAUER, DIETMAR
Exec Dt:
11/20/2009
BICH, ARMIN
Exec Dt:
11/19/2009
FREY, MONIKA
Exec Dt:
11/20/2009
SCHERM, WOLFGANG
Exec Dt:
11/23/2009
OTTO, STEFAN
Exec Dt:
11/27/2009
MAUL, RAINER
Exec Dt:
11/26/2009
KRAUSE, HELMUT
Exec Dt:
11/19/2009
Assignee:
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10
JENA, GERMANY D-07745
Correspondent:
MARC M. WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
040069/0705Recorded: 09/19/2016Pages: 7
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
CARL ZEISS SMS GMBH
Exec Dt:
05/12/2015
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
MARC WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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