Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/17/2015
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Application #:
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13091770
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Filing Dt:
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04/21/2011
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Publication #:
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Pub Dt:
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08/25/2011
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Inventors:
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Takumi TANDOU, Kenetsu Yokogawa, Masaru Izawa
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-24-14, NISHI SHIMBASHI |
| MINATO-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 N. 17TH STREET |
| SUITE 550 |
| ARLINGTON, VA 22209 |
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