Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/15/2014
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Application #:
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13018226
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Filing Dt:
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01/31/2011
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Publication #:
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Pub Dt:
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08/25/2011
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Inventors:
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Hans Butler, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen et al
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Title:
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LITHOGRAPHIC APPARATUS AND METHOD FOR CORRECTING A POSITION OF A STAGE OF A LITHOGRAPHIC APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| JACK S. BARUFKA |
| 1650 TYSONS BOULEVARD, SUITE 1400 |
| MCLEAN, VA 22102 |
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