Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13039816
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Filing Dt:
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03/03/2011
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Publication #:
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Pub Dt:
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09/08/2011
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Inventors:
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Kenichi SUZAKI, Takuya JODA
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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| VOLPE AND KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| UNITED PLAZA, SUITE 1600 |
| PHILADELPHIA, PA 19103 |
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