Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/31/2015
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Application #:
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12723187
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Filing Dt:
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03/12/2010
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Publication #:
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Pub Dt:
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09/15/2011
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Inventors:
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John C. Forster, Xianmin Tang
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Title:
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Apparatus and Method for Improved Darkspace Gap Design in RF Sputtering Chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2881 SCOTT BLVD. |
| M/S 2061 |
| SANTA CLARA, CALIFORNIA 95050 |
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| DIEHL SERVILLA LLC |
| 77 BRANT AVENUE |
| SUITE 210 |
| CLARK, NJ 07066 |
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