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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13044741
Filing Dt:
03/10/2011
Publication #:
Pub Dt:
09/15/2011
Inventors:
Hidetami Yaegashi, Masanobu Honda, Akitaka Shimizu
Title:
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Assignment: 1
Reel/Frame:
025932/0672Recorded: 03/10/2011Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/08/2011
Exec Dt:
02/08/2011
Exec Dt:
03/08/2011
Assignee:
3-1, AKASAKA 5-CHOME,
MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondent:
TUROCY & WATSON, LLP
57TH FLOOR, KEY TOWER
127 PUBLIC SQUARE
CLEVELAND, OH 44114

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