Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/23/2013
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Application #:
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12724165
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Filing Dt:
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03/15/2010
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Publication #:
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Pub Dt:
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09/15/2011
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Inventors:
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Yadong Jiang, Zhiming Wu, Xiaolin Han, Tao Wang, Weizhi Li
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Title:
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Wet metal-etching method and apparatus for MEMS device fabrication
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 4, SECTION 2, NORTH JIANSHE ROAD |
| CHENGDU, SICHUAN PROVINCE, CHINA 610054 |
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| ZHEN ZHENG LU |
| 1730 HUNTINGTON DRIVE #304 |
| DUARTE, CA 91010 |
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