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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
05/20/2014
Application #:
13130600
Filing Dt:
05/23/2011
Publication #:
Pub Dt:
09/22/2011
Inventors:
Michael Arnz, Dirk Beyer, Wolfgang Harnisch, Thomas Scheruebl
Title:
METHOD AND DEVICE FOR MEASURING THE RELATIVE LOCAL POSITION ERROR OF ONE OF THE SECTIONS OF AN OBJECT THAT IS EXPOSED SECTION BY SECTION
Assignment: 1
Reel/Frame:
027771/0635Recorded: 02/28/2012Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/10/2012
Exec Dt:
02/21/2012
Exec Dt:
02/16/2012
Exec Dt:
02/21/2012
Assignee:
CARL-ZEISS-PROMENADE 10
JENA, GERMANY 07745
Correspondent:
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
040069/0705Recorded: 09/19/2016Pages: 7
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
05/12/2015
Assignee:
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
MARC WEFERS
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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