Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/12/2013
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Application #:
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12802209
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Filing Dt:
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06/02/2010
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Publication #:
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Pub Dt:
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09/29/2011
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Inventors:
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Hsin-Hui Hsu, Chuan-Wei Wang, Sheng-Ta Lee, Chih-Hung Lu
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Title:
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MEMS lithography mask with improved tungsten deposition topography and method for the same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5F, NO. 5, INNOVATION ROAD I |
| HSINCHU SCIENCE PARK |
| HSIN-CHU, TAIWAN |
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| RANDY E. TUNG |
| TUNG & ASSOCIATES |
| 838 W. LONG LAKE ROAD |
| SUITE 120 |
| BLOOMFIELD HILLS, MICHIGAN 48302 |
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